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[Lecture] Planar Cavity-Free Silicon Nanowire Micro Thermoelectric Generators

DEC . 31 2019
Title: Planar Cavity-Free Silicon Nanowire Micro Thermoelectric Generators

Time: December 31, 2019, 15:00-17:00 

Venue: West 646, Physics Building

Zhan Tianzhuo (Waseda University)

Abstract: Micro thermoelectric generators (TEG) have recently attracted great attention for applications such as monolithic on-chip thermal management of advanced high-performance chips and wireless power supply for the sensor network in the Internet of Things (IoT) society. Silicon is the most abundant and environmentally friendly semiconductor material. Benefit from the integration, scalability and low cost of complementary metal-oxide-semiconductor (CMOS) processing technology, various Si-based micro TEGs have been developed. In this talk, a planar cavity-free Si-nanowire micro TEG architecture fabricated by the CMOS processing technology will be introduced. The TEG utilizes a temperature gradient that is formed in the proximity of a perpendicular heat flow to the substrate. Thus, there is no need to etch away the substrate to form suspended Si-nanowires, which leads to a low fabrication cost and well-protected Si-nanowires. A high thermoelectric power density of 12 μW/cm2 under the harvesting mode is realized by applying a temperature difference of 5 K.

Edited by:
Qiu Tianjie