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[Lecture] Photon-based and electron-based nanofabrication technologies
Jul. 15, 2022

Speaker: Min Qiu, Westlake University

Moderator: Renmin Ma, Peking University

Time: 20:00 pm, July 15, 2022, GMT+8

Venue: iCANX Talks platform

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Micro/nanoscale fabrication and characterization is the basis for the application of optoelectronic devices. With the rise of artificial intelligence, information storage and metamaterials, it becomes increasingly difficult for traditional technologies to meet the needs of building advanced devices. In recent years, the rapid developments of photonic technology and electronic technology have provided new strategies for modern manufacturing. For instance, femtosecond lasers have advantages of short duration and high power density, which can be used to realize large-area, high-speed and multi-dimensional fabrication. A focused electron beam can also be used for direct writing of nanostructures with high flexibility and resolution. The process is streamline and contamination-free when using water ice as an electron resist. Aiming at the fabrication of next-generation optoelectronic devices, this talk will introduce two promising nanofabrication technologies based on photon-matter and electron-matter interactions, respectively. Perspectives and future trends of advanced manufacturing will also be presented.


Prof. Min Qiu received a B.Sc. in Physics in 1995 and a Condense Matter Physics in 1999, both from Zhejiang University, China. He received his second Ph.D. in Electromagnetic Theory from the Royal Institute of Technology   (KTH), Sweden, in 2001. He joined the School of Information and Communication Technology, KTH as an assistant professor  (2001), then became an associate professor  (2005), and a full professor    (Professor of Photonics)   (2009). He then joined Zhejiang University, China    (2010), as a distinguished professor, where he served as Director of the State Key Laboratory of Modern Optical Instrumentation, Zhejiang University. Since 2018, he has been the Chair Professor of Photonics and Vice President for Research, Westlake University, China. Prof. Min Qiu is currently editor-in-chief of PhotoniX   (Springer Nature), a topical editor of Light: Science and Applications  (Springer Nature), and an associate editor of Science Bulletin   (Science China Press). He was the recipient of the Individual Grants for the Advancement of Research Leaders   (INGVAR) from the Swedish Foundation for Strategic Research (SSF), and also held a Senior Researcher Fellowship from Swedish Research Council. He is leading a project on solar thermal energy utilization through the National Key Research and Development Program of China, and a project on ice-assisted electron beam lithography through the National Major Scientific Instruments and Equipments Development Project of the National Natural Science Foundation of China. His current research focuses on micro- and nano-optoelectronics, including micro- & nano-fabrication and instrument equipment, theory of micro- & nano-photonics and optoelectronic devices, as well as the key theories and technologies for intelligent applications. To honour his contributions to nanophotonic devices, Prof. Qiu was elected to the director-at-large on the Board of Directors of Optica, and a fellow of the SPIE、IEEE and COS. He was the recipient of the National Science Fund for Distinguished Young Scholars.

Source: iCANX